Tokyo, Japan

Koji Tometsuka


Average Co-Inventor Count = 5.0

ph-index = 2

Forward Citations = 30(Granted Patents)


Company Filing History:


Years Active: 1992-1993

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2 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Koji Tometsuka

Introduction

Koji Tometsuka is an accomplished inventor from Tokyo, Japan, known for his pioneering work in the semiconductor manufacturing industry. With two patents to his name, Tometsuka has made significant advancements in wafer transfer methods and mechanisms that enhance the efficiency of vertical Chemical Vapor Deposition (CVD) diffusion apparatus.

Latest Patents

Tometsuka's latest patents focus on a wafer transfer mechanism in vertical CVD diffusion apparatus. The innovations include a comprehensive wafer transfer method that improves the handling of both product and monitor wafers. Specifically, the vertical-type CVD diffusion apparatus is designed with a boat that accommodates multiple wafers stacked in a horizontal orientation. In this method, product wafers are transferred to the boat in groups of five, while dummy wafers can be transferred in the same quantity or slightly fewer. Additionally, monitor wafers are strategically inserted one at a time between blocks of product and dummy wafers, optimizing the overall transfer process.

Career Highlights

Currently, Koji Tometsuka is associated with Kokusai Electric Co., Ltd., a company renowned for its cutting-edge technology in semiconductor manufacturing equipment. His work has contributed significantly to the efficiency and effectiveness of CVD processes, which are critical in producing high-quality semiconductor wafers.

Collaborations

Throughout his career, Tometsuka has collaborated with talented coworkers such as Yasuhiro Harada and Toshikazu Karino. Together, they have leveraged their expertise to push the boundaries of innovation in wafer processing technologies, showcasing the importance of teamwork in the field of engineering and invention.

Conclusion

Koji Tometsuka's contributions to semiconductor technology through his patented innovations highlight the impact of dedicated inventors in advancing modern manufacturing processes. As the industry continues to evolve, Tometsuka's innovations provide a glimpse into the future of efficient semiconductor production, fostering further developments in this critical field.

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