Koichi Fujii

Title: Koichi Fujii: Innovator in Lithographic Technology

Introduction

Koichi Fujii is a notable inventor based in Saitama, Japan. He has made significant contributions to the field of lithography, particularly in the development of systems and methods for adjusting lithographic scanners. His work has implications for improving the precision and efficiency of lithographic processes.

Latest Patents

Fujii holds a patent for "Systems and methods for adjusting a lithographic scanner." This patent describes a system and methods for modeling the behavior of a lithographic scanner. It focuses on using thresholds of an image profile to characterize through-pitch printing behavior. The method involves running a lithographic model for a target tool and matching it with another tool across various settings, including lens numerical aperture and annular ratio of a pattern produced by an illuminator. Ultimately, the method selects the setting that most closely matches the output of the target tool.

Career Highlights

Throughout his career, Koichi Fujii has worked with prominent companies in the industry, including Nikon Corporation and Nikon Precision Incorporated. His experience in these organizations has allowed him to refine his expertise in lithographic technology and contribute to advancements in the field.

Collaborations

Fujii has collaborated with various professionals, including Stephen P. Renwick, to further enhance the development of lithographic systems and methods.

Conclusion

Koichi Fujii's innovative work in lithographic technology, particularly his patent on adjusting lithographic scanners, showcases his commitment to advancing the field. His contributions continue to influence the industry and improve the efficiency of lithographic processes.