Company Filing History:
Years Active: 1997
Title: Kohji Oda: Innovator in Mask Structure Technology
Introduction
Kohji Oda is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of lithography through his innovative patent. His work focuses on enhancing the manufacturing processes of solid-state devices.
Latest Patents
Kohji Oda holds a patent for a mask structure having a phase-shifting pattern suitable for forming fine device patterns. This mask structure features two or more groups of device patterns formed on a transparent support plate. Each device pattern includes a transparent partial pattern, and one or both groups are equipped with phase-shifting patterns to improve resolution in lithography. The design allows for the combination of transparent partial patterns through multiple transmissions of an exposure beam, facilitating the manufacturing of solid-state devices.
Career Highlights
Kohji Oda is associated with Hitachi, Ltd., where he has contributed to advancements in technology and innovation. His expertise in mask structures has positioned him as a key figure in the development of lithographic techniques.
Collaborations
Kohji Oda has collaborated with notable coworkers, including Ryo Imura and Yoshinori Hoshina. Their combined efforts have furthered research and development in the field of lithography.
Conclusion
Kohji Oda's contributions to mask structure technology exemplify the importance of innovation in the manufacturing of solid-state devices. His work continues to influence advancements in lithography and device fabrication.