This inventor holds 1 USPTO granted patent. Top assignee: Fujitsu Corporation. Active years: 1997.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1997
Title: Kiyokatsu Suzuki: Innovator in Semiconductor Manufacturing
Introduction
Kiyokatsu Suzuki is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of semiconductor manufacturing. His innovative approach has led to the development of a unique apparatus and method that enhances the efficiency of semiconductor device production.
Latest Patents
Kiyokatsu Suzuki holds a patent for a semiconductor device manufacturing apparatus and its cleaning method. This invention includes a reaction chamber designed to exhaust gas and a cleaning gas supplying system that introduces cleaning gas containing ClF.sub.3 into the reaction chamber. The system features multiple gas blowout holes strategically formed in the flow direction of gas within the reaction chamber. The design allows for the cleaning gas supplying system to be a tube extending along the inner wall or central axis of the reaction chamber, with several through holes in the side wall of the tube. This innovative method effectively suppresses damage to the inner surface of the reaction chamber and facilitates the removal of films attached to the inner wall in a short time.
Career Highlights
Kiyokatsu Suzuki is associated with Fujitsu Corporation, where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the manufacturing processes within the company. His dedication to innovation has positioned him as a key figure in the semiconductor industry.
Collaborations
Kiyokatsu Suzuki has collaborated with notable colleagues, including Fumitake Mieno and Hirokazu Yamanishi. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Kiyokatsu Suzuki's contributions to semiconductor manufacturing through his innovative patent demonstrate his commitment to enhancing production efficiency. His work continues to influence the industry and showcases the importance of innovation in technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile