This inventor holds 3 USPTO granted patents and 2 published patent applications and 1 EPO patent. Top assignee: Tokyo Electron Limited. Active years: 2002-2014.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Kikuyo-Machi, JP (2002 - 2004)
- Koshi, JP (2014)
Company Filing History:
Years Active: 2002-2014
Title: Kiminari Sakaguchi: Innovator in Substrate Processing Technologies
Introduction
Kiminari Sakaguchi is a notable inventor based in Kikuyo-Machi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of substrate carrying mechanisms and processing methods.
Latest Patents
Sakaguchi's latest patents include a substrate carrying mechanism, a substrate carrying method, and a recording medium storing a program that includes a set of instructions to execute the substrate carrying method. The substrate carrying mechanism features a base and a substrate holding member that can hold a substrate and be advanced or retracted. It incorporates four or more detecting units that identify different parts of the substrate's edge when the holding member is retracted. A controller determines if a notch in the substrate's edge has been detected and corrects any transfer position errors based on measurements from the detecting units. Additionally, his substrate processing method involves applying ultraviolet rays to an insulating film material on a wafer, which reduces the contact angle and allows for a smoother application of the material, resulting in a thicker and flatter insulating film on the substrate.
Career Highlights
Kiminari Sakaguchi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has contributed to advancements in substrate processing technologies, making significant impacts in the field.
Collaborations
Sakaguchi has collaborated with notable coworkers such as Kei Miyazaki and Yuichiro Uchihama, further enhancing the innovative environment at Tokyo Electron Limited.
Conclusion
Kiminari Sakaguchi's contributions to substrate processing technologies through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His advancements continue to influence the efficiency of substrate handling and processing methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile