Bucheon, South Korea

Kil-ju Yun

This inventor holds 1 USPTO granted patent. Top assignees: Korean Accelerator & Plasma Research Association, Soosan Precision Co., Ltd.. Active years: 1998.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kil-ju Yun. Retrieved from https://idiyas.com/inventor/kil-ju-yun

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile


% Patents Active = 100.0

Average Co-Inventor Count = 4.0

ph-index = 1


Company Filing History:


Years Active: 1998

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1 patent (USPTO):Explore Patents

Title: Kil-ju Yun: Innovator in Plasma Etching Technology

Introduction

Kil-ju Yun is a notable inventor based in Bucheon, South Korea. He has made significant contributions to the field of plasma etching technology, particularly with his innovative designs and patents. His work has implications for various industries, including semiconductor manufacturing and materials processing.

Latest Patents

Kil-ju Yun holds a patent for a Multi-cathode Electron Beam Plasma Etcher. This advanced etching device comprises a vacuum chamber, several cathodes that generate an electron beam to create plasma over a large area, and a series of electrodes that form an electrostatic lens. The design includes a first vacuum evacuation device, an etching gas injection device, a second vacuum evacuation device, and a holder for the etched body. This invention enhances the efficiency and effectiveness of plasma etching processes.

Career Highlights

Throughout his career, Kil-ju Yun has worked with prominent organizations such as Soosan Precision Co., Ltd. and the Korean Accelerator & Plasma Research Association. His experience in these companies has allowed him to refine his skills and contribute to cutting-edge research and development in plasma technology.

Collaborations

Kil-ju Yun has collaborated with several professionals in his field, including Kie-hyung Chung and Sang-young Kim. These partnerships have fostered innovation and have been instrumental in advancing plasma etching technologies.

Conclusion

Kil-ju Yun's contributions to the field of plasma etching technology are noteworthy. His patent for the Multi-cathode Electron Beam Plasma Etcher exemplifies his innovative spirit and technical expertise. His work continues to influence advancements in various industries.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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