This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2025-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2025-2026
Title: Kevin Lai - Innovator in Substrate Processing Technology
Introduction
Kevin Lai is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate processing technology. His innovative work has led to the development of a patent that enhances the efficiency of dielectric etching processes.
Latest Patents
Kevin Lai holds a patent titled "Profile twisting control in dielectric etch." This patent describes a substrate processing apparatus that includes a vacuum chamber with upper and lower electrodes. The processing zone is designed for processing a substrate using plasma. The upper electrode features a surface that is substantially parallel to the substrate's surface when positioned in the chamber. The apparatus incorporates at least one magnetic field source that generates active magnetic fields through the processing zone. A controller is coupled to the magnetic field source and the upper electrode, allowing for the application of RF power to generate plasma using a process gas. The controller also manages the current through the magnetic field source during substrate processing, based on a target value corresponding to the characteristics of the active magnetic fields. Kevin holds 1 patent in this area.
Career Highlights
Kevin Lai is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve substrate processing methods. His expertise in this field has positioned him as a valuable asset to his team and the company.
Collaborations
Kevin has collaborated with several talented individuals, including Neil Macaraeg Mackie and Chen Li. These collaborations have fostered an environment of innovation and creativity, contributing to the success of their projects.
Conclusion
Kevin Lai is a distinguished inventor whose work in substrate processing technology has made a significant impact in the industry. His patent on profile twisting control in dielectric etch exemplifies his commitment to innovation and excellence.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile