Tokyo, Japan

Kenshiro Ohtsubo

USPTO Granted Patents = 3 

Average Co-Inventor Count = 4.3

ph-index = 1


Company Filing History:


Years Active: 2017-2025

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3 patents (USPTO):

Title: Innovations of Kenshiro Ohtsubo

Introduction

Kenshiro Ohtsubo is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate inspection technology. With a total of three patents to his name, Ohtsubo's work focuses on enhancing the efficiency and effectiveness of defect detection in substrates.

Latest Patents

One of Ohtsubo's latest patents is a substrate inspection device. The purpose of this invention is to provide a device that increases the flatness of a substrate during inspection and improves the detection sensitivity of foreign matter. This device features a turntable on which the substrate is mounted, along with a clamp mechanism that holds the substrate securely. The clamp mechanism is designed with an abutting part that moves in the in-plane direction of the substrate, applying pressure to enhance inspection accuracy.

Another significant patent is a defect inspection apparatus and method. This apparatus includes a first objective lens with an optical axis perpendicular to the wafer mounting surface and a second objective lens that forms a predetermined acute angle with respect to the same surface. It also incorporates a dichroic mirror that reflects light of a specific wavelength while transmitting or reflecting light of another wavelength. This innovative design allows for improved detection capabilities in defect inspection.

Career Highlights

Ohtsubo has worked with prominent companies such as Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. His experience in these organizations has contributed to his expertise in developing advanced inspection technologies.

Collaborations

Throughout his career, Ohtsubo has collaborated with notable colleagues, including Takeru Utsugi and Toshifumi Honda. These collaborations have likely enriched his work and led to further innovations in the field.

Conclusion

Kenshiro Ohtsubo's contributions to substrate inspection technology through his patents demonstrate his commitment to innovation. His work continues to influence the industry and improve defect detection methods.

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