Company Filing History:
Years Active: 2000-2003
Title: Kenneth O'Neill: Innovator in Semiconductor Technology
Introduction
Kenneth O'Neill is a notable inventor based in Phoenix, AZ, who has made significant contributions to the field of semiconductor technology. With a total of 2 patents, his work focuses on reducing particle contamination in semiconductor manufacturing processes.
Latest Patents
O'Neill's latest patents include innovative apparatuses designed to enhance the efficiency and cleanliness of semiconductor processing. One of his patents, titled "Substrate Handling Chamber," describes an apparatus and method for reducing particles in reactors. This invention features an enclosure with a wafer handling chamber connected to a processing chamber via an isolation gate valve. The system utilizes pipes to deliver purge gas into the wafer handling chamber, effectively eliminating particles from the enclosure. A pilot-operated back pressure regulator manages the delivery and removal of the purge gas, while a Bernoulli wand is employed for lifting and holding individual semiconductor wafers. The apparatus also incorporates ionizers in the purge gas lines to discharge static electricity, preventing wafers from being attracted to one another.
Another patent, "System and Method for Reducing Particles in Epitaxial Reactors," shares similar principles. It includes an enclosure for processing semiconductor wafers, with a focus on maintaining a clean environment. The apparatus features a controlled isolation gate valve and a Bernoulli wand, along with a dome-loaded regulator to manage gas flow rates. The use of ionizers and an alpha particle emission source further enhances the effectiveness of the system by ionizing the purge gas and discharging static.
Career Highlights
Kenneth O'Neill is currently employed at Asm America, Inc., where he continues to develop innovative solutions for the semiconductor industry. His work has been instrumental in advancing technologies that improve the reliability and performance of semiconductor devices.
Collaborations
Throughout his career, O'Neill has collaborated with notable colleagues, including Allan Doley and Dennis L Goodwin. These partnerships have contributed to the successful development of his patented technologies.
Conclusion
Kenneth O'Neill's contributions to semiconductor technology through his innovative patents demonstrate his commitment to enhancing manufacturing processes. His work continues to influence the industry, ensuring cleaner and more efficient production methods.