This inventor holds 1 USPTO granted patent. Top assignee: Novellus Systems Incorporated. Active years: 2002.
Company Filing History:
Years Active: 2002
Title: Innovations of Kenneth K Barber in Semiconductor Technology
Introduction
Kenneth K Barber is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor technology. With a focus on enhancing the efficiency of semiconductor wafer processing, Barber's work has implications for increased throughput in manufacturing.
Latest Patents
Barber holds a patent for an "Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput." This innovative design features a multi-level shelf degas station that utilizes at least two heaters integrated within wafer holding shelves. The unique aspect of this invention is that the semiconductor wafers do not come into direct contact with the heater shelves, allowing for conduction heating. The process involves positioning the heater and wafer holder assembly through each wafer slot sequentially. If a degassed wafer is present, a transfer chamber arm removes it, while a loader arm places a new wafer in the available slot. This system allows for individual processing of wafers while maintaining the efficiency of the overall degassing treatment.
Career Highlights
Kenneth K Barber is associated with Novellus Systems Incorporated, a company known for its advancements in semiconductor manufacturing technology. His work at Novellus has been instrumental in developing methods that improve the efficiency and effectiveness of wafer processing.
Collaborations
Barber has collaborated with notable colleagues such as Mark Fissel and Soo Yun Joh, contributing to the innovative environment at Novellus Systems. Their combined expertise has fostered advancements in semiconductor technologies.
Conclusion
Kenneth K Barber's contributions to semiconductor technology, particularly through his patented innovations, highlight his role as a key figure in enhancing manufacturing processes. His work continues to influence the industry and improve the efficiency of semiconductor wafer processing.
