Kenneth J Torres

Title: Innovations by Kenneth J Torres in Semiconductor Processing

Introduction

Kenneth J Torres is an accomplished inventor based in Austin, TX (US). He has made significant contributions to the field of semiconductor processing, particularly with his innovative support apparatus designed to minimize gravitational stress on semiconductor wafers during thermal processing.

Latest Patents

Kenneth holds a patent for a "Support apparatus for semiconductor wafer processing." This invention focuses on a support apparatus that minimizes gravitational stress in semiconductor wafers, especially silicon wafers, during thermal processing. The apparatus consists of two concentric circular support structures positioned on a common support fixture. These structures are strategically located at specific percentages of the semiconductor wafer radius to provide optimal support. The design allows for either solid rings or spaced support points, facilitating wafer loading and unloading. To endure the high temperatures encountered during processing, the apparatus is made from refractory materials such as silicon carbide, quartz, and graphite. This innovative support apparatus can be adapted for use in both batch and single-wafer processors.

Career Highlights

Kenneth J Torres is associated with Sandia Corporation, where he has been able to apply his expertise in semiconductor technology. His work has contributed to advancements in the efficiency and reliability of semiconductor processing.

Collaborations

Kenneth has collaborated with notable colleagues, including Stewart K Griffiths and Robert H Nilson, who have also contributed to the field of semiconductor technology.

Conclusion

Kenneth J Torres is a prominent inventor whose work in semiconductor wafer processing has led to innovative solutions that enhance the efficiency of thermal processing. His contributions continue to impact the semiconductor industry positively.