Kenneth E Linxwiler

Title: The Innovative Contributions of Kenneth E Linxwiler

Introduction

Kenneth E Linxwiler is a notable inventor based in McKinney, Texas. He has made significant contributions to the field of semiconductor processing through his innovative patent. His work focuses on enhancing the efficiency of plasma afterglow technology, which is crucial for the semiconductor industry.

Latest Patents

Kenneth E Linxwiler holds a patent for a "Microwave apparatus for generating plasma afterglows." This invention is designed for stripping and etching photoresist and semiconductor materials at a high rate, enabling single wafer processing in fully automated reactors. The apparatus features a stripping and etching chamber that utilizes plasma afterglow for effective photoresist stripping and selective isotropic etching of materials like polysilicon and silicon nitride. It employs various etchant compositions to create reactive species in a plasma environment. Additionally, the apparatus can facilitate anisotropic etching by decoupling etchant generation from ion production and acceleration, utilizing two plasma sources: microwave power and radio frequency (RF) power.

Career Highlights

Kenneth has dedicated his career to advancing technologies that improve semiconductor manufacturing processes. His innovative approach has led to the development of efficient methods for etching and stripping, which are essential for the production of high-quality semiconductor devices. His work has been instrumental in pushing the boundaries of what is possible in automated semiconductor processing.

Collaborations

Throughout his career, Kenneth E Linxwiler has collaborated with esteemed colleagues, including John E Spencer and Richard A Borel. These collaborations have contributed to the advancement of technologies in the semiconductor field, showcasing the importance of teamwork in innovation.

Conclusion

Kenneth E Linxwiler's contributions to the field of semiconductor processing through his innovative patent demonstrate his commitment to advancing technology. His work not only enhances efficiency in manufacturing but also sets a foundation for future innovations in the industry.