Morgan Hill, CA, United States of America

Kenneth C McMahon


Average Co-Inventor Count = 7.0

ph-index = 4

Forward Citations = 36(Granted Patents)


Company Filing History:


Years Active: 2002-2003

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4 patents (USPTO):Explore Patents

Title: Innovations of Kenneth C McMahon

Introduction

Kenneth C McMahon is a notable inventor based in Morgan Hill, California. He holds a total of four patents, showcasing his contributions to the field of technology and engineering. His work primarily focuses on methods and apparatuses for drying wafers and substrates, which are essential in various manufacturing processes.

Latest Patents

One of his latest patents is a "Wafer drying apparatus and method." This invention involves removing liquid from wafers that have been wet in a liquid bath. The wafer and the bath are separated at a controlled rate, ensuring that a meniscus forms between the liquid bath and the wafer's surface. The design includes a gas-filled volume defined by a hot chamber that continuously transfers thermal energy to the wafer. Hot gas is directed into this volume, facilitating efficient drying.

Another significant patent is the "Apparatus for drying batches of disks." This invention describes a method for drying substrates that have been wet in an elongated liquid bath. The substrates are moved relative to the bath and an elongated gas-filled volume, with controlled rates of movement to maintain a thin layer of liquid on each substrate. The thermal energy transferred in the gas-filled volume evaporates this layer without disrupting the separation rate between the substrates and the bath.

Career Highlights

Throughout his career, Kenneth has worked with prominent companies, including Lam Research Corporation. His experience in these organizations has contributed to his expertise in developing innovative drying technologies.

Collaborations

Kenneth has collaborated with notable individuals in his field, including Jonathan E Borkowski and Oliver David Jones. These partnerships have likely enhanced his work and led to further advancements in his inventions.

Conclusion

Kenneth C McMahon's contributions to the field of wafer and substrate drying technologies demonstrate his innovative spirit and technical expertise. His patents reflect significant advancements that are valuable in various manufacturing processes.

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