This inventor holds 3 USPTO granted patents. Top assignee: Nikon Corporation. Active years: 2000-2008.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Chiyoda-ku, JP (2004)
- Ushiku, JP (2000 - 2008)
Company Filing History:
Years Active: 2000-2008
Title: Kenji Udagawa: Innovator in Gas Filtration Technology
Introduction
Kenji Udagawa is a notable inventor based in Ushiku, Japan. He has made significant contributions to the field of gas filtration technology, holding a total of 3 patents. His work focuses on improving gas temperature stability while effectively removing impurities.
Latest Patents
Udagawa's latest patents include a filter apparatus, an exposure apparatus, and a device-producing method. The filter apparatus is designed to enhance gas temperature stability while maintaining a high capacity for impurity removal. It features a filter for removing impurities and a temperature adjuster that regulates the gas temperature to a predetermined level. Additionally, a humidity detector is positioned upstream of the filter to adjust the gas's humidity before it passes through.
The exposure apparatus and device manufacturing method involve a chemical filter that removes pollutants from gas and controls temperature fluctuations. This system is integrated into a ventilation path extending from a machine chamber housing an air conditioning unit to a main body chamber containing the exposure apparatus. By maintaining a chemically clean atmosphere around the exposure apparatus, Udagawa's invention effectively limits issues such as illumination reduction caused by tarnished optical members.
Career Highlights
Kenji Udagawa is currently employed at Nikon Corporation, where he continues to innovate in the field of gas filtration. His work has been instrumental in enhancing the performance and reliability of exposure apparatuses used in various applications.
Collaborations
Udagawa collaborates with esteemed colleagues, including Fumio Karibe and Yoshitomo Nagahashi. Their combined expertise contributes to the advancement of technology in their field.
Conclusion
Kenji Udagawa's contributions to gas filtration technology demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the challenges in maintaining gas purity and temperature stability. Udagawa's work continues to influence the industry positively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile