Kenji Mitomo

Title: Kenji Mitomo: Innovator in Surface Inspection Technology

Introduction

Kenji Mitomo is a prominent inventor based in Hitachinaka, Japan. He has made significant contributions to the field of surface inspection technology, holding a total of 5 patents. His work focuses on developing advanced methods and apparatuses for inspecting surfaces, particularly in the semiconductor industry.

Latest Patents

One of Kenji Mitomo's latest patents is a "Surface inspecting apparatus and method for calibrating same." This invention involves an illumination optical system that irradiates the surface of a contaminated standard wafer with illumination light. The light is then scanned over the surface, and detectors in a detection optical system detect the scattered light. A predefined reference value, along with the detection results, is used to calculate a compensation parameter for detection sensitivity correction. This parameter is managed by separating it into time-varying deterioration, optical characteristics, and sensor characteristics, facilitating easier calibration of detection sensitivity.

Another notable patent is the "Inspection method and inspection apparatus." This application describes an inspection apparatus that includes a stage for holding a specimen, an illumination optical system for illuminating the specimen's surface, and a dark-field optical system for detecting scattered light. The apparatus also features a photoelectric converter, an A/D converter, a judgment unit, and a signal processor, all working together to determine the dimensions of foreign substances on the specimen's surface based on the magnitude of the scattered light.

Career Highlights

Kenji Mitomo has worked with Hitachi High-Technologies Corporation, where he has been instrumental in advancing surface inspection technologies. His expertise and innovative approach have led to the development of several key patents that enhance the accuracy and efficiency of surface inspections.

Collaborations

Throughout his career, Kenji has collaborated with notable colleagues, including Takashi Okawa and Kenji Oka. These partnerships have contributed to the successful development of his inventions and have fostered a collaborative environment for innovation.

Conclusion

Kenji Mitomo's contributions to surface inspection technology have made a significant impact in the field. His innovative patents and collaborative efforts continue to advance the industry, showcasing his dedication to improving inspection methods and apparatuses.