Location History:
- Tokyo, JP (1997 - 1999)
- Hyogo, JP (1996 - 2001)
Company Filing History:
Years Active: 1996-2001
Title: Kenji Marumoto: Innovator in X-ray Mask Technology
Introduction
Kenji Marumoto, an accomplished inventor based in Hyogo, Japan, has made significant contributions to the field of X-ray mask technology. With a total of six patents to his name, he continues to push the boundaries of innovation, particularly in methods that enhance the precision and performance of X-ray masks.
Latest Patents
Among Kenji Marumoto's recent innovations is the patent for a "Stress Adjustment Method of X-ray Mask." This inventive approach involves depositing an X-ray absorber on a membrane and applying a stress adjustment step to achieve an average film stress of zero. After the X-ray absorber is patterned, the position accuracy of the pattern is measured, followed by another stress adjustment process applied to the patterned mask. This method effectively reduces any pattern position offset of the X-ray absorber, leading to improved mask performance.
Additionally, he holds a patent for the "X-ray Mask Provided with an Alignment Mark and Method of Manufacturing the Same," showcasing his expertise in ensuring precise alignment in X-ray lithography.
Career Highlights
Kenji Marumoto is a crucial member of Mitsubishi Electric Corporation, where he contributes his expertise to the advancement of X-ray mask technology. His role at the company involves not just innovation but also the practical application of developments that can significantly impact the semiconductor manufacturing industry.
Collaborations
Working alongside respected colleagues such as Hideki Yabe and Sunao Aya, Kenji Marumoto fosters a collaborative environment that emphasizes teamwork in the pursuit of groundbreaking inventions. Their combined efforts play a crucial role in the continuous advancement of technologies within Mitsubishi Electric Corporation.
Conclusion
Kenji Marumoto stands out as a key figure in the realm of X-ray mask innovation. His dedicated work at Mitsubishi Electric Corporation and his impressive range of patents underscore his commitment to enhancing the precision of manufacturing technologies. As advances in this field continue to unfold, his contributions remain essential to the development of more efficient and accurate electronics manufacturing processes.