Kenji Kikuchi

Title: Kenji Kikuchi: Innovator in Data Processing Technologies

Introduction

Kenji Kikuchi is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of data processing, holding a total of 3 patents. His work focuses on enhancing the efficiency and accuracy of semiconductor manufacturing processes.

Latest Patents

Kikuchi's latest patents include a data processing method and apparatus, a reticle mask, and an exposing method and apparatus. The data processing apparatus he developed features a grid pattern area calculation section that calculates the minimum grid and the present area of a circuit element for each layer of circuit patterns provided by CAD data. Additionally, it includes an overlap area calculation section that determines the overlap area of present areas, and a composition/division optimization judgment section that assesses whether the layers with the overlap area should be processed using a single common grid or different grids. This innovation allows for the assignment of grids with the minimum accuracy required for each layer, significantly reducing the operational load in creating reticle mask data and processing loads during exposure.

Another notable patent involves a method and apparatus for producing partial-area mask data files. This invention divides the full area of a semiconductor integrated circuit into unit areas and generates a mask data file for use in beam exposure systems or inspection apparatuses based on CAD data. The process includes producing full-area header information that relates the starting address of mask data for each unit area to its positional information, as well as partial-area header information for each divided area. This allows for the extraction of mask data files corresponding to the partial area header information.

Career Highlights

Kenji Kikuchi is currently employed at Fujitsu Corporation, where he continues to innovate in the field of data processing technologies. His work has been instrumental in advancing semiconductor manufacturing techniques.

Collaborations

Kikuchi has collaborated with notable colleagues such as Tomoyuki Okada and Masahiko Minemura, contributing to various projects that enhance the capabilities of data processing systems.

Conclusion

Kenji Kikuchi's contributions to data processing technologies have made a significant impact on the semiconductor industry. His innovative patents reflect his commitment to improving manufacturing processes and efficiency.