Kengo Torii

Title: Kengo Torii: Innovator in Wafer Technology

Introduction

Kengo Torii is a prominent inventor based in Handa, Japan. He has made significant contributions to the field of wafer technology, holding a total of 5 patents. His innovative designs have advanced the efficiency and functionality of ceramic heaters and wafer holding tables.

Latest Patents

One of Kengo Torii's latest patents is a wafer-heating device. This device features a ceramic heater with a central-zone heating resistor and an outer-peripheral-zone heating resistor embedded in a disc-like ceramic base. The central-zone heating resistor is designed as a wire that extends in a single continuous line between a pair of terminals, which collectively form a circular shape in plan view. Another notable patent is for a wafer holding table. This table includes a ceramic electrostatic chuck, a metal cooling plate, a resin layer with predetermined thermal resistance, and a stress relaxation layer that has a lower Young's modulus than the resin layer. The multilayer structure of the resin layer consists of several resin sheets laminated together, making it thinner than a comparative sample with a single-layer structure.

Career Highlights

Kengo Torii is currently employed at NGK Insulators, Inc., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in developing advanced materials and devices that enhance the performance of semiconductor manufacturing processes.

Collaborations

Throughout his career, Kengo has collaborated with notable colleagues such as Hiroshi Takebayashi and Keita Yamana. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Kengo Torii's contributions to wafer technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of materials and engineering principles, making him a key figure in the advancement of semiconductor technology.