Introduction: Kenetsu Mizusawa is a distinguished inventor based in Nirasaki, Japan, recognized for his significant contributions to the field of gas supply technology. With a total of 7 patents to his name, Mizusawa's innovations play a crucial role in advancing substrate processing apparatuses, particularly in the semiconductor industry.

Latest Patents: Among Mizusawa's recent patents is a groundbreaking gas supply unit designed for delivering gases into processing chambers where substrates are treated. This innovative unit consists of multiple gas supply sources and a mixing line to create a gaseous mixture. The system includes several branch lines for distributing the mixture across different locations within the processing chamber. An additional feature of this gas supply unit is its capability to introduce a specified extra gas into the mixture flowing through at least one branch line.

Moreover, the gas supply unit is equipped with pressure gauges and valves to regulate gas flow rates in the branch lines, ensuring precise control over the processes involved. A pressure ratio controller is also a key component, allowing for the management of the gas mixtures' pressure ratios by adjusting valve openings based on data from the pressure gauges.

Career Highlights: Mizusawa's professional journey is marked by his tenure at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment sector. His work has not only advanced existing technologies but also influenced the design of next-generation semiconductor processing systems.

Collaborations: Throughout his career, Mizusawa has collaborated with talented individuals in his field, including his coworkers Keiki Ito and Masahide Itoh. Their combined expertise has propelled innovative projects and contributed to successful outcomes in their respective projects.

Conclusion: Kenetsu Mizusawa exemplifies the spirit of innovation in the realm of gas supply technology for semiconductor processing. His patents embody practical solutions that enhance the efficiency and effectiveness of processing chambers. As he continues to push the boundaries of technology, Mizusawa's contributions will undoubtedly have a lasting impact on the industry.

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