Ken O'Neill

Title: Ken O'Neill: Innovator in Semiconductor Processing Technology

Introduction

Ken O'Neill is a notable inventor based in Winston-Salem, NC (US). He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of wafer transfer systems.

Latest Patents

One of Ken O'Neill's latest patents is a substrate transfer system for semiconductor processing equipment. This innovative system facilitates wafer transfer through a susceptor unit that consists of an inner susceptor section resting within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or outer susceptor sections. When the inner section is engaged, the support spider lifts it vertically out of the outer section. Conversely, when the outer section is engaged, the support spider raises and lowers the entire susceptor unit. Additionally, a robotic arm end effector engages only the lower surface of the outer edge of the wafer, allowing for hot wafer pick-up and unloading by the inner susceptor section. Several end effectors are disclosed that minimize non-uniform thermal effects on the substrate.

Career Highlights

Ken O'Neill is currently employed at Asm America, Inc., where he continues to develop innovative solutions in semiconductor technology. His expertise in wafer transfer systems has positioned him as a key player in the industry.

Collaborations

Ken has collaborated with notable coworkers such as Ivo Johannes Raaijmakers and Loren R Jacobs, contributing to advancements in semiconductor processing technologies.

Conclusion

Ken O'Neill's contributions to semiconductor processing through his innovative patents and career at Asm America, Inc. highlight his importance in the field. His work continues to influence the efficiency of wafer transfer systems, showcasing his dedication to technological advancement.