This inventor holds 1 USPTO granted patent. Top assignee: Murata Manufacturing Co., Ltd.. Active years: 2003.
Company Filing History:
Years Active: 2003
Title: Ken Funato: Innovator in Sputtering Technology
Introduction
Ken Funato is a notable inventor based in Kanazawa, Japan. He has made significant contributions to the field of sputtering technology, particularly with his innovative designs that enhance the efficiency of thin film deposition processes.
Latest Patents
Ken Funato holds a patent for an in-line sputtering apparatus. This apparatus includes a deposition chamber, a target installed inside the chamber, and a substrate holder that holds a substrate. The substrate holder is equipped with a transferring mechanism that allows it to move relative to the target, enabling the formation of a thin film made from the target material on the substrate. The invention also features first and second thickness distribution correcting members, each with multiple movable plates, and a plate driving mechanism that symmetrically moves these plates.
Career Highlights
Ken Funato is associated with Murata Manufacturing Co., Ltd., where he has been instrumental in advancing sputtering technology. His work has contributed to the development of more efficient manufacturing processes in the electronics industry.
Collaborations
Ken has collaborated with notable colleagues such as Kazunori Shimoda and Eiichi Takata, who have also contributed to advancements in related technologies.
Conclusion
Ken Funato's innovative work in sputtering technology exemplifies the impact of dedicated inventors in the field of manufacturing. His patent for the in-line sputtering apparatus showcases his commitment to enhancing production efficiency and quality.