Kelly Fong

Title: Innovations by Kelly Fong: Pioneering Patents in Semiconductor Technology

Introduction

Kelly Fong is an accomplished inventor based in San Mateo, California, recognized for her significant contributions to semiconductor technology. With a total of three patents to her name, she has made remarkable strides in the industry, particularly through her work with edge rings and aluminum-plated components.

Latest Patents

Fong's latest patents include groundbreaking devices designed for electrostatic chucks and aluminum-plated semiconductor components. One of her patents describes an edge ring specifically engineered for use with electrostatic chucks that hold substrates in plasma environments. This device features a concentric design with an edge step for optimal mechanical coupling with a ceramic top piece. The configuration ensures that the flat portion remains horizontal and parallel to the substrate, enhancing efficiency during operation.

Another important patent focuses on aluminum-plated components used in semiconductor material processing apparatus. This innovation includes a substrate and an optional intermediate layer featuring an aluminum plating that is electrically conductive. The design allows for the potential incorporation of an anodized layer, which serves as a process-exposed surface. These advancements are crucial for improving the manufacturing processes of semiconductor devices.

Career Highlights

Kelly Fong is currently employed by Lam Research Corporation, a company renowned for its cutting-edge technology in semiconductor fabrication. Her work continues to shape the industry, as she pushes the boundaries of what is possible in semiconductor processing and manufacturing.

Collaborations

Throughout her career, she has had the opportunity to collaborate with notable colleagues such as Ian J Kenworthy and Leonard John Sharpless. These collaborations have fostered an environment of innovation and knowledge sharing, further enhancing the impact of her work in the field.

Conclusion

Kelly Fong's contributions to semiconductor technology are notable, particularly her inventive patents that enhance manufacturing processes. As she continues to work with Lam Research Corporation and collaborate with her peers, Fong's innovations promise to play a crucial role in the evolution of the semiconductor industry.