Keiji Miyachi

Title: Keiji Miyachi: Innovator in Nozzle Technology

Introduction

Keiji Miyachi is a notable inventor based in Owariasahi, Japan. He has made significant contributions to the field of cleaning apparatus technology, particularly through his innovative nozzle device.

Latest Patents

Miyachi holds a patent for a nozzle device and a cleaning apparatus equipped with this nozzle. The patent describes a nozzle device that features a substantially cylindrical nozzle body and a cup member arranged within the cylinder. This design allows for the jettisoning of fluid droplets from the tip of the nozzle while being driven to turn. The invention effectively mixes two or more fluids, including a detergent and a gas, which are jetted out to achieve efficient cleaning of a single wafer. This method prevents the re-adhesion of contamination and the destruction of the wafer's pattern. The fluid droplets produced can be controlled to a smaller size than those generated by conventional double-fluid cleaning systems or high-pressure jet systems.

Career Highlights

Miyachi is associated with Asahi Sunac Corporation, where he continues to develop and refine his innovative technologies. His work has been instrumental in advancing cleaning technologies used in various applications.

Collaborations

Miyachi collaborates with Yoshiyuki Seike, contributing to the development of advanced cleaning solutions.

Conclusion

Keiji Miyachi's contributions to nozzle technology and cleaning apparatuses highlight his role as an influential inventor in the field. His innovative designs continue to impact the industry positively.