Location History:
- Chiba-ken, JP (1996)
- Ageo, JP (2013)
- Chiyoda-ku, JP (2018)
Company Filing History:
Years Active: 1996-2018
Title: Keiji Inada – A Pioneer in Optical Measurement Technologies
Introduction
Keiji Inada is a notable inventor based in Chiyoda-ku, Japan, recognized for his contributions to optical measurement technologies. With a remarkable portfolio of three patents, Inada has significantly advanced the field through innovative approaches in positioning detection.
Latest Patents
Among his notable inventions, Inada has developed an interferometric apparatus for detecting the 3D position of a diffracting object. This advanced position detecting apparatus comprises a light source that supplies detecting light, a light-collecting optical system for focusing this light onto a diffracted light generating portion on the object, and a light guiding optical system that directs diffracted measuring light generated from this portion to a designated position. Additionally, the apparatus includes a photodetector, which is strategically arranged to detect interference fringes created by the diffracted measuring light and the reference light. This innovation allows for the highly accurate detection of three-dimensional positional information, such as that of a mask pattern surface or an exposure surface of a photosensitive substrate, all achieved with a relatively simple construction.
Career Highlights
Keiji Inada's career is closely associated with Nikon Corporation, where his work focuses on optical technologies and innovations. His contributions have significantly enhanced the capabilities of measurement systems, making them more efficient and accurate in various industrial applications.
Collaborations
Throughout his career, Inada has collaborated with esteemed colleagues such as Mikihiko Ishii and Tetsuya Koike. These collaborations have fostered an environment of innovation, leading to the development of cutting-edge technologies in the field of optical measurements.
Conclusion
Keiji Inada stands out as a pivotal figure in the realm of optical measurement technologies, with his inventive works paving the way for future advancements. His patents reflect a strong commitment to enhancing measurement capabilities, making him a notable inventor in today's technological landscape.