Company Filing History:
Years Active: 2020-2022
Title: Kazuyuki Tomizawa: Innovator in Wafer Technology
Introduction
Kazuyuki Tomizawa is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of wafer technology, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of wafer handling and processing.
Latest Patents
Tomizawa's latest patents include a wafer stage and method of manufacturing the same. This innovative wafer stage features an electrostatic chuck (ESC) plate, an upper supporting plate, a lower supporting plate, and a temperature controller. The ESC plate supports a wafer on its first surface, while the upper supporting plate is bonded to the opposite surface. The design minimizes heat capacity and prevents warpage, ensuring the wafer stage can withstand pressure differences effectively.
Another notable patent is the wafer loading apparatus and film forming apparatus. This device aims to create a more uniform temperature distribution across the surface of a wafer. It includes a stage for loading the wafer and a heater that enhances the heating process. The arrangement of heater coils allows for a varied heat distribution, improving the overall performance of the wafer loading process.
Career Highlights
Kazuyuki Tomizawa is currently employed at Samsung Electronics Co., Ltd. His work at this leading technology company has allowed him to develop and refine his innovative ideas in wafer technology. His contributions have been instrumental in advancing the capabilities of semiconductor manufacturing.
Collaborations
Throughout his career, Tomizawa has collaborated with notable colleagues, including Masashi Kikuchi and Michio Ishikawa. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Kazuyuki Tomizawa is a key figure in the field of wafer technology, with a focus on enhancing the efficiency of wafer handling and processing. His patents reflect his commitment to innovation and excellence in the semiconductor industry.