Kazuyuki Ogura

Title: Kazuyuki Ogura: Innovator in Electrostatic Chuck Technology

Introduction

Kazuyuki Ogura is a notable inventor based in Nagano, Japan. He has made significant contributions to the field of electrostatic chuck technology, which is essential in various manufacturing processes, particularly in the semiconductor industry. His innovative approach has led to the development of a unique patent that enhances the efficiency and effectiveness of electrostatic chucks.

Latest Patents

Kazuyuki Ogura holds 1 patent for his invention of an electrostatic chuck. This electrostatic chuck features a structure where a heater is sandwiched between a base member and an electrostatic chuck substrate. The heater is bonded to the base member with an adhesive layer interposed between them. The adhesive layer consists of a first adhesive layer made from a high thermal conductivity adhesive and a second adhesive layer formed as a gel from an adhesive with lower viscosity. Both layers are preferably made of a silicone-based resin, which enhances the performance of the electrostatic chuck.

Career Highlights

Kazuyuki Ogura is associated with Shinko Electric Industries Co., Ltd., a company known for its advancements in electronic components and systems. His work at this company has allowed him to focus on innovative solutions that address the challenges faced in the semiconductor manufacturing process.

Collaborations

Kazuyuki has collaborated with notable colleagues such as Hiroshi Yonekura and Akihiro Kuribayashi. Their combined expertise has contributed to the development of cutting-edge technologies in their field.

Conclusion

Kazuyuki Ogura's contributions to electrostatic chuck technology exemplify the importance of innovation in the semiconductor industry. His patent reflects a significant advancement that can lead to improved manufacturing processes.