Kawasaki, Japan

Kazuyeshi Ueki


Average Co-Inventor Count = 8.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 1989

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1 patent (USPTO):Explore Patents

Title: The Innovations of Kazuyeshi Ueki: Advancements in Photoresist Technology

Introduction: Kazuyeshi Ueki, an innovative inventor based in Kawasaki, Japan, has made significant contributions to the field of semiconductor device manufacturing. With a focus on enhancing the thermal stability of photoresist films, Ueki's work has paved the way for advancements in the technology used in various electronic applications.

Latest Patents: Ueki holds a patent for an "Apparatus for treating photoresists," which employs an ultraviolet radiation process applicable in the manufacture of semiconductor devices. This invention focuses on improving the thermal stability of photoresist films on semiconductor wafers. The apparatus allows for high-speed and effective treatment of photoresist patterns by preventing deformation caused by light radiated from discharge lamps, such as high-pressure mercury vapor lamps. The method utilizes a technique that selectively intercepts or reduces certain wavelengths in the spectral response region of the photoresist from the radiant energy obtained from the discharge lamp.

Career Highlights: Ueki's tenure at Ushio Denki has been marked by his dedication to advancing photoresist technology. His inventive approach has garnered attention in the semiconductor industry, affirming his reputation as an influential figure in the field. With one patent to his name, Ueki continues to drive efforts in creating more efficient processes for semiconductor production.

Collaborations: Ueki works alongside esteemed colleagues such as Shinji Suzuki and Tetsuji Arai, contributing to a collaborative environment that fosters innovation. Together, they have played pivotal roles in the ongoing development of technologies that support the semiconductor sector.

Conclusion: Kazuyeshi Ueki stands out as a remarkable inventor whose work in photoresist technology is making a lasting impact on the semiconductor manufacturing industry. His innovative apparatus for treating photoresists and collaborative spirit with fellow engineers like Shinji Suzuki and Tetsuji Arai herald a future of continued advancements in electronics. With ongoing development, the significance of Ueki's contributions will only grow, solidifying his legacy in the domain of technological innovation.

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