Kazuo Sasaki

Title: Kazuo Sasaki: Innovator in Plasma Processing Technology

Introduction

Kazuo Sasaki is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on developing advanced apparatuses that enhance the efficiency and effectiveness of plasma processing.

Latest Patents

Sasaki's latest patents include innovative designs for inductively-coupled plasma processing apparatuses. One of his notable inventions is an inductively-coupled plasma processing apparatus designed for rectangular substrates. This apparatus features a processing container, a mounting table, and a rectangular metal window that is electrically insulated from the processing container. The antenna unit generates an inductively-coupled plasma within the processing container, with a unique design that includes a first high-frequency antenna composed of segments arranged to optimize plasma generation.

Another patent describes an inductively coupled plasma processing apparatus that performs plasma processing on a substrate by generating plasma in a designated region within a processing chamber. This design incorporates a high-frequency antenna and a metal window that is divided into multiple sections, enhancing the apparatus's functionality and efficiency.

Career Highlights

Kazuo Sasaki is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing plasma processing technologies, which are critical for various applications in electronics manufacturing.

Collaborations

Sasaki has collaborated with notable colleagues, including Toshihiro Tojo and Hitoshi Saito. These collaborations have contributed to the development of innovative technologies and have furthered advancements in the field of plasma processing.

Conclusion

Kazuo Sasaki's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His inventions continue to influence the efficiency of plasma processing applications, showcasing the importance of innovation in technology.