Tokyo-to, Japan

Kazuhisa Hayashida


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 16(Granted Patents)


Company Filing History:


Years Active: 2003

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1 patent (USPTO):Explore Patents

Title: Kazuhisa Hayashida: Innovator in Thermal Processing Technology

Introduction

Kazuhisa Hayashida is a prominent inventor based in Tokyo-to, Japan. He is known for his significant contributions to the field of thermal processing technology. With a focus on enhancing the uniformity of coated films, his work has implications for various applications in semiconductor manufacturing.

Latest Patents

Hayashida holds a patent for an "Apparatus and method of thermal processing and method of pattern formation." This innovative patent describes a process where a substrate coated with a solution is heated on a plate within a processing chamber filled with circulating inert gas. The method involves controlling the density of the solvent in the chamber to promote efficient evaporation while maintaining the uniformity of the coated film.

Career Highlights

Kazuhisa Hayashida has made notable advancements in the semiconductor industry through his work at Tokyo Electron Limited. His expertise in thermal processing has positioned him as a key figure in developing technologies that enhance manufacturing processes.

Collaborations

Throughout his career, Hayashida has collaborated with esteemed colleagues such as Hiroshi Shinya and Kazuyoshi Mizumoto. These partnerships have contributed to the advancement of innovative solutions in the field.

Conclusion

Kazuhisa Hayashida's contributions to thermal processing technology exemplify the impact of innovation in the semiconductor industry. His patent and collaborative efforts continue to influence advancements in manufacturing processes.

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