Kazuhiro Toshima

Title: Kazuhiro Toshima: Innovator in Semiconductor Manufacturing

Introduction

Kazuhiro Toshima is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of semiconductor devices, particularly in the area of patterning processes.

Latest Patents

One of Kazuhiro Toshima's latest patents addresses a critical issue in the patterning process of semiconductor devices that utilize inverted stagger type thin-film transistors (TFTs). The patent outlines a method that employs a normal photolithography step using diazo naphthoquinone (DNQ)-Novolac resin based positive photo resist. The invention aims to solve the problem of area dependency of the photo resist pattern side wall taper angle, which can significantly influence the variation of etching shapes during the dry-etching step. By adjusting the pre-bake temperature or post-exposure-bake (PEB) temperature and effectively evacuating solvent from the photo resist film, the volume contraction during the post-bake process is minimized. This innovative approach successfully addresses the deformation issues caused by volume contraction.

Career Highlights

Kazuhiro Toshima is currently associated with Semiconductor Energy Laboratory Co., Ltd., where he continues to advance semiconductor technology. His expertise in photolithography and semiconductor device manufacturing has positioned him as a key figure in the industry.

Collaborations

Throughout his career, Kazuhiro has collaborated with notable colleagues, including Ichiro Uehara and Shunpei Yamazaki. These partnerships have further enriched his contributions to semiconductor innovations.

Conclusion

Kazuhiro Toshima's work in semiconductor manufacturing exemplifies the importance of innovation in technology. His patents not only address critical challenges in the industry but also pave the way for future advancements in semiconductor devices.