Kazuhiro Joo

Title: Kazuhiro Joo: Innovator in Plasma Processing Technology

Introduction

Kazuhiro Joo is a notable inventor based in Kudamatsu, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of seven patents. His work focuses on improving the accuracy and efficiency of plasma processing apparatuses.

Latest Patents

Among his latest innovations, Joo has developed advanced plasma processing apparatuses. One of his patents describes a system that includes a detector for detecting interference light of multiple wavelengths from a sample's surface during processing. This apparatus features a pattern comparator that compares actual deviation pattern data with standard deviation patterns, allowing for precise calculations of film thickness. Another patent outlines a method for measuring the remaining thickness or etching depth of a processed layer, ensuring accurate online measurements. This system also includes a recorder for time-series data on film thickness and an endpoint decision unit to determine the completion of etching.

Career Highlights

Kazuhiro Joo has had a distinguished career, working with prominent companies such as Hitachi, Ltd. and Hitachi High-Technologies Corporation. His experience in these organizations has allowed him to refine his expertise in plasma processing technologies and contribute to various innovative projects.

Collaborations

Throughout his career, Joo has collaborated with talented individuals, including Kouji Nishihata and Shoji Ikuhara. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in the field.

Conclusion

Kazuhiro Joo's contributions to plasma processing technology have established him as a leading inventor in his field. His innovative patents and collaborations reflect his commitment to advancing technology and improving industrial processes.