Katsuya Hara

Title: Katsuya Hara: Innovator in Magnetron Sputtering Technology

Introduction

Katsuya Hara is a notable inventor based in Kanagawa, Japan. He has made significant contributions to the field of magnetron sputtering technology, which is essential in various manufacturing processes, particularly in the semiconductor industry. His innovative work has led to the development of a unique cathode unit that enhances the efficiency of sputtering apparatuses.

Latest Patents

Katsuya Hara holds a patent for a "Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus." This invention features a cathode unit that includes a backing plate joined to an upper side opposed to a sputtering surface of a target. The design incorporates a magnet unit positioned above the backing plate, creating an interval that allows for optimal performance. Additionally, a refrigerant passage is formed in the backing plate, enabling the circulation of refrigerant to maintain the desired temperature during operation. The surface pressure applying unit is a key component, as it applies pressure to the backing plate, ensuring effective sputtering.

Career Highlights

Katsuya Hara is currently employed at Ulvac, Inc., a company renowned for its advanced vacuum technology and equipment. His role at Ulvac has allowed him to further develop his expertise in sputtering technology and contribute to the company's innovative projects. His work has been instrumental in enhancing the performance and reliability of sputtering apparatuses used in various applications.

Collaborations

Throughout his career, Katsuya Hara has collaborated with talented professionals, including Koji Suzuki and Hideto Nagashima. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas, ultimately leading to advancements in their respective fields.

Conclusion

Katsuya Hara's contributions to magnetron sputtering technology exemplify the impact of innovative thinking in the manufacturing sector. His patent and work at Ulvac, Inc. highlight his commitment to advancing technology and improving industrial processes. His achievements serve as an inspiration for future inventors in the field.