This inventor holds 1 USPTO granted patent. Top assignee: Novellus Systems Incorporated. Active years: 2000.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2000
Title: Katherina Konjuh: Innovator in Chemical Vapor Deposition Technology
Introduction
Katherina Konjuh is a notable inventor based in San Jose, CA (US). She has made significant contributions to the field of chemical vapor deposition, particularly in the development of surface treatments for antireflective layers. Her innovative work has implications for the semiconductor industry and beyond.
Latest Patents
Katherina holds a patent for her invention titled "Surface treatment of antireflective layer in chemical vapor deposition." This patent addresses a critical issue in the chemical vapor deposition process, where a surface layer is formed on an antireflective layer to prevent amines from neutralizing acid components during the exposure of an overlying photoresist layer. The surface layer is created by introducing an oxygen-containing gas, such as N₂O, into the CVD chamber in the presence of radio frequency power after the antireflective layer has been established. This innovative approach enhances the performance and reliability of semiconductor manufacturing processes.
Career Highlights
Katherina is currently employed at Novellus Systems Incorporated, a company known for its advanced semiconductor manufacturing equipment. Her role at Novellus has allowed her to further her research and development efforts in chemical vapor deposition technologies. With her expertise, she has contributed to the advancement of processes that are essential for modern electronics.
Collaborations
Katherina has collaborated with various professionals in her field, including her coworker Wilbert G Van Den Hoek. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in semiconductor manufacturing.
Conclusion
Katherina Konjuh is a pioneering inventor whose work in chemical vapor deposition has made a significant impact on the semiconductor industry. Her patent and contributions to Novellus Systems Incorporated highlight her role as a leader in technological innovation.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile