Poughkeepsie, NY, United States of America

Karl W Beumer


Average Co-Inventor Count = 7.0

ph-index = 1

Forward Citations = 7(Granted Patents)


Company Filing History:


Years Active: 1987

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1 patent (USPTO):

Title: Innovations of Karl W Beumer

Introduction

Karl W Beumer is a notable inventor based in Poughkeepsie, NY (US). He is recognized for his contributions to high-precision workpiece positioning systems, particularly in the field of electron beam lithography. His innovative approach has significantly impacted the semiconductor industry.

Latest Patents

Karl W Beumer holds a patent for a "Workpiece mounting and clamping system having submicron positioning." This invention is a high precision, high throughput submicrometer workpiece positioning system. It is particularly useful as a workpiece positioning means in electron beam lithography tools. The system enhances mechanical stability by essentially eliminating mechanical hysteresis. This allows state-of-the-art electron beam lithography systems to provide the repeatable, accurate, and dense circuit patterns that modern semiconductor trends demand. The positioning system comprises a movable positioning table and a workpiece supporting superstructure, which is elastically joined to the movable positioning table by three geometrically distinct kinematic support means. A laser interferometer locating-positioning system is utilized to position the workpiece, with the interferometer mirrors being integral with the workpiece supporting superstructure.

Career Highlights

Karl W Beumer has made significant strides in his career, particularly through his work at International Business Machines Corporation (IBM). His innovative designs and patents have contributed to advancements in technology and manufacturing processes.

Collaborations

Throughout his career, Karl has collaborated with notable coworkers such as Charles A Gaston and Charles H Locke. These collaborations have fostered an environment of innovation and creativity, leading to groundbreaking advancements in their respective fields.

Conclusion

Karl W Beumer's contributions to the field of precision workpiece positioning have made a lasting impact on the semiconductor industry. His innovative patent and collaborations with esteemed colleagues highlight his role as a significant inventor in modern technology.

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