Company Filing History:
Years Active: 2005
Title: Jürgen Knobloch: Innovator in Photolithography
Introduction
Jürgen Knobloch is a notable inventor based in Waakirchen, Germany. He has made significant contributions to the field of photolithography, particularly in the development of advanced mask technologies. His innovative work has led to the filing of a patent that enhances the precision of wafer exposure in projection apparatuses.
Latest Patents
Jürgen Knobloch holds a patent for a "Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus." This patent describes a method where auxiliary openings are assigned to openings on a mask to be transferred to a wafer. These auxiliary openings possess a phase-shifting property, ideally between 160° and 200° relative to the openings, and have a cross-section that is below the limiting dimension for the printing of the projection apparatus. This design ensures that the auxiliary openings are not printed onto the wafer, while still enhancing the contrast of the aerial image, particularly for isolated or semi-isolated openings on the wafer.
Career Highlights
Jürgen Knobloch is associated with Infineon Technologies AG, a leading company in semiconductor solutions. His work at Infineon has been pivotal in advancing photolithographic techniques, which are essential for the production of microelectronic devices. His innovative approaches have contributed to the efficiency and effectiveness of wafer processing.
Collaborations
Throughout his career, Jürgen has collaborated with esteemed colleagues such as Uwe Griesinger and Mario Hennig. These collaborations have fostered a productive environment for innovation and have led to significant advancements in their respective fields.
Conclusion
Jürgen Knobloch's contributions to photolithography and his innovative patent demonstrate his commitment to advancing technology in the semiconductor industry. His work continues to influence the field and showcases the importance of innovation in driving progress.