Company Filing History:
Years Active: 2011
Title: Innovations of Jyh-Chemg Sheu in Rapid Thermal Processing
Introduction
Jyh-Chemg Sheu is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in rapid thermal processing technologies. His innovative work has led to the development of a patented cooling system that enhances the efficiency of thermal processing chambers.
Latest Patents
One of Jyh-Chemg Sheu's key patents is titled "Rapid cooling system for RTP chamber." This invention involves a rapid thermal processing chamber equipped with a wafer support for holding a wafer. The system includes a tank that supplies cooling liquid, which is in fluid communication with the chamber. A pump facilitates the movement of the cooling liquid from the tank to the chamber, effectively cooling the wafer during the cooling phase of rapid thermal processing. This innovation is crucial for improving the performance and reliability of semiconductor devices.
Career Highlights
Jyh-Chemg Sheu is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this prestigious company has allowed him to contribute to advancements in manufacturing processes and technologies. With a total of 1 patent to his name, he has established himself as a valuable asset in the field.
Collaborations
Throughout his career, Jyh-Chemg Sheu has collaborated with talented individuals such as Chien Ling Hwang and Yu-Liang Lin. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in semiconductor manufacturing.
Conclusion
Jyh-Chemg Sheu's contributions to rapid thermal processing technology exemplify the importance of innovation in the semiconductor industry. His patented cooling system represents a significant advancement that enhances the efficiency of thermal processing chambers. Through his work and collaborations, he continues to influence the future of semiconductor manufacturing.