Location History:
- Bucheon-si, KR (2022)
- Gyeonggi-do, KR (2024)
Company Filing History:
Years Active: 2022-2024
Title: Jung Mo Gu: Innovator in Plasma Processing Technology
Introduction
Jung Mo Gu is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His innovative work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
Jung Mo Gu's latest patents include a "Device for Multi-Level Pulsing" and a "Plasma Processing Apparatus and Method of Operating the Same." The device for multi-level pulsing minimizes power reflection when generating plasma using an RF signal with multiple pulsing levels. It features an RF signal generator that produces an RF signal with distinct first and second pulsing levels, along with a matching network that provides a corresponding output signal to a load. The RF signal generator is designed to ensure that the first and second target impedances are different from each other.
The plasma processing apparatus includes a processing chamber for plasma generation, a chuck member that supports a substrate, and at least two RF power sources that provide RF power of different frequencies. Additionally, it features a ring member surrounding the chuck member, an edge electrode insulated from the chuck member, and a variable impedance circuit connected to the edge electrode. This circuit includes an adjustable impedance to control the edge electrode's potential and a high-frequency stop circuit to block high-frequency power transmission.
Career Highlights
Jung Mo Gu is currently employed at Semes Co., Ltd., where he continues to develop innovative technologies in plasma processing. His work has significantly advanced the capabilities of substrate processing, making him a valuable asset to his company and the industry.
Collaborations
Some of his notable coworkers include Ja Myung Gu and Goon Ho Park, who contribute to the collaborative environment at Semes Co., Ltd. Their teamwork fosters innovation and drives the development of cutting-edge technologies.
Conclusion
Jung Mo Gu's contributions to plasma processing technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of the complexities involved in substrate processing, positioning him as a key figure in the field.