This inventor holds 3 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2001-2003.
Company Filing History:
Years Active: 2001-2003
Title: Innovations of Jung-il An in Semiconductor Manufacturing
Introduction
Jung-il An is a notable inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 3 patents. His work primarily focuses on optimizing chemical vapor deposition methods, which are crucial for the production of semiconductor devices.
Latest Patents
One of Jung-il An's latest patents is a chemical vapor deposition method for manufacturing semiconductor devices. This invention provides a method for optimizing the recipe of the in-situ cleaning process for the process chamber after specific processes on semiconductor wafers. The method utilizes a Residual Gas Analyzer Quadrupole Mass Spectrometer (RGA-QMS) to analyze the sampling gas. The optimization of the end points according to gas flow, pressure, and temperature of the cleaning process is achieved through this analysis.
Another significant patent by Jung-il An is related to a chemical vapor deposition apparatus for manufacturing semiconductor devices, along with its driving method and the method of optimizing the cleaning process recipe. This invention also incorporates the use of RGA-QMS for analyzing the gas inside the process chamber, ensuring efficient cleaning and maintenance of the equipment.
Career Highlights
Jung-il An is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics and semiconductor industry. His work at Samsung has allowed him to contribute to advancements in semiconductor technology, enhancing the efficiency and effectiveness of manufacturing processes.
Collaborations
Throughout his career, Jung-il An has collaborated with notable colleagues, including Baik-soon Choi and Jung-Ki Kim. These collaborations have fostered innovation and development in the field of semiconductor manufacturing.
Conclusion
Jung-il An's contributions to semiconductor manufacturing through his innovative patents and work at Samsung Electronics Co., Ltd. highlight his importance in the industry. His focus on optimizing chemical vapor deposition methods has the potential to significantly impact the efficiency of semiconductor production.