Location History:
- Nirasaki, JP (2020)
- Yamanashi, JP (2018 - 2022)
Company Filing History:
Years Active: 2018-2022
Title: Jun Nakagomi: Innovator in Plasma Processing Technology
Introduction
Jun Nakagomi is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His innovative work has paved the way for advancements in various applications involving plasma.
Latest Patents
One of Nakagomi's latest patents is a plasma processing apparatus. This apparatus features a microwave introducing module located at the ceiling of a processing chamber, designed to introduce a microwave that generates plasma from a gas. Additionally, it includes multiple gas supply holes that facilitate the introduction of gas into the plasma processing space. Each gas supply hole consists of a fine hole and an expanded cavity, with the cavity's diameter being 3 mm or more, which is crucial for effective plasma generation.
Another notable patent is an electric field sensor, which comprises a probe, a cylindrical probe guide, an insulating member, a preload spring, and a connector. The probe acts as the inner conductor of a coaxial transmission path and includes a monopole antenna at its tip. This design ensures constant contact with a microwave transmission window, enhancing the sensor's performance.
Career Highlights
Jun Nakagomi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to focus on developing cutting-edge technologies that improve plasma processing techniques.
Collaborations
Throughout his career, Nakagomi has collaborated with talented individuals such as Tomohito Komatsu and Taro Ikeda. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Jun Nakagomi's contributions to plasma processing technology exemplify his dedication to innovation. His patents reflect a deep understanding of the complexities involved in plasma generation and processing. As he continues to work at Tokyo Electron Limited, his future endeavors are likely to further advance the field.