Jui-Hsiang Cheng

Title: Innovations of Jui-Hsiang Cheng in Semiconductor Manufacturing

Introduction

Jui-Hsiang Cheng is a notable inventor based in Taichung City, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent. His work focuses on improving the efficiency and effectiveness of semiconductor processes.

Latest Patents

Jui-Hsiang Cheng holds a patent for an "Addition system and method of reducing agent in semiconductor manufacturing process." This invention includes a comprehensive addition system that features pre-treatment and post-treatment gas concentration detection devices, a process exhaust gas treatment device, a reducing agent supply device, and an addition system control device. The process exhaust gas treatment device is designed to purify exhaust gas from semiconductor manufacturing and emit a post-treatment gas. The reducing agent supply device introduces a reducing agent gas into the process exhaust gas treatment device. Furthermore, the post-treatment gas concentration detection device measures the residual concentration of the reducing agent gas in the post-treatment gas. The addition system control device calculates the destruction and removal efficiency (DRE) for process gases based on pre-treatment and post-treatment gas concentrations. It then sends a signal to the reducing agent supply device to control the amount of reducing agent gas added, based on the DRE and the residual concentration.

Career Highlights

Jui-Hsiang Cheng is affiliated with the Industrial Technology Research Institute, where he continues to advance his research and development efforts in semiconductor technology. His innovative approach has positioned him as a key figure in the industry.

Collaborations

Jui-Hsiang Cheng collaborates with I-Ling Nien, who is also involved in semiconductor research. Their partnership enhances the development of innovative solutions in the field.

Conclusion

Jui-Hsiang Cheng's contributions to semiconductor manufacturing through his patent demonstrate his commitment to innovation and efficiency. His work is vital for the advancement of technology in this critical industry.