Company Filing History:
Years Active: 2010-2015
Title: Juergen Henrich: Innovator in Load Lock Chamber Designs
Introduction
Juergen Henrich is a notable inventor based in Limeshain, Germany. He has made significant contributions to the field of high-throughput processing systems, particularly through his innovative designs of load lock chambers. With a total of 3 patents to his name, Henrich continues to push the boundaries of technology in his area of expertise.
Latest Patents
Henrich's latest patents include groundbreaking designs that enhance the efficiency of substrate transfer in processing environments. One of his notable inventions is a load lock chamber designed for high-throughput processing systems. This invention provides methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment. The load lock chamber features a first circular housing and a second circular housing that is movable relative to the first. This design allows for selective fluid communication with vacuum pumps based on the angular position of the second housing.
Another significant patent is the dynamic load lock with a cellular structure for discrete substrates. This chamber includes multiple actuators that create a desired pressure gradient from atmospheric pressure to processing pressure. It features a transport belt that continuously runs through the chamber, facilitating the movement of substrates. The design ensures that separation between adjacent pressure regions is maintained as substrates are transported, enhancing the overall efficiency of the processing line.
Career Highlights
Henrich is currently employed at Applied Materials, Inc., where he applies his expertise in developing advanced processing technologies. His work has been instrumental in improving the performance and reliability of high-throughput systems.
Collaborations
Throughout his career, Henrich has collaborated with talented individuals such as Susanne Schlaefer and Alexander S Polyak. These collaborations have contributed to the innovative solutions he has developed in the field.
Conclusion
Juergen Henrich is a distinguished inventor whose work in load lock chamber designs has significantly impacted high-throughput processing systems. His innovative patents reflect his commitment to advancing technology in this critical area.