Sunnyvale, CA, United States of America

Joseph Lanucha


Average Co-Inventor Count = 3.0

ph-index = 4

Forward Citations = 73(Granted Patents)


Location History:

  • Sunnyvale, CA (US) (1995)
  • San Jose, CA (US) (1997)

Company Filing History:


Years Active: 1995-1997

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4 patents (USPTO):Explore Patents

Title: Innovations of Joseph Lanucha: Pioneering Semiconductor Processing

Introduction

Joseph Lanucha is an accomplished inventor based in Sunnyvale, California, with a total of four patents to his name. His innovative contributions primarily focus on enhancing semiconductor device processing to improve efficiency and reduce contamination. As a leading figure at Applied Materials, Inc., he has developed cutting-edge technologies that have garnered significant attention in the semiconductor field.

Latest Patents

Two of Joseph's latest patents highlight his expertise in minimizing particulate contamination during semiconductor device processing. The first patent involves a method for reducing contaminant particles in a vacuum plasma processing chamber. This invention describes a process where the chamber's pressure is reduced to elevate particles above obstructions, followed by maintaining a plasma from a gas fed into the chamber. By increasing the gas flow, Joseph's technique efficiently sweeps the particles through the exhaust system, ensuring a cleaner processing environment.

The second patent addresses the control of particle generation within a reaction chamber. This innovative approach utilizes an RF signal that is rapidly increased to a high power level to initiate a plasma, effectively agitating and circulating any particles for thorough cleaning. Additionally, the gradual introduction of RF signals prevents particle disturbance during wafer processing. The inclusion of a magnetic field in the reaction chamber aids in moving particles to the exhaust line, thereby preventing contamination of processed wafers.

Career Highlights

Joseph Lanucha's career at Applied Materials, Inc. has been marked by a commitment to advancing technology in the semiconductor industry. His inventions contribute significantly to improving the quality and reliability of semiconductor devices, making him a valuable asset to his company and the industry as a whole.

Collaborations

Throughout his career, Joseph has had the opportunity to collaborate with esteemed colleagues, including Anand Gupta and Yan Ye. Together, they have shared insights and expertise, fostering an innovative environment that drives the development of cutting-edge technologies in semiconductor processing.

Conclusion

Joseph Lanucha stands out as a prominent inventor in the semiconductor industry, with a focused approach to reducing contamination during device processing. His contributions through patents and collaborations reflect his dedication to pushing the boundaries of technology at Applied Materials, Inc. As the semiconductor field continues to evolve, Joseph's innovations will undoubtedly play a critical role in shaping the future of the industry.

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