This inventor holds 1 USPTO granted patent. Top assignee: Delco Electronics Corporation. Active years: 1999.
Company Filing History:
Years Active: 1999
Title: Joseph Keith Folsom: Innovator in Silicon Wafer Protection
Introduction
Joseph Keith Folsom is a notable inventor based in Fort Wayne, IN (US). He has made significant contributions to the field of semiconductor technology, particularly in the protection of silicon wafers during the manufacturing process. His innovative approach has led to advancements in bulk micromachining techniques.
Latest Patents
Folsom holds a patent for a method of protecting silicon wafers during wet chemical etching. This process is crucial for forming silicon micromachined structures. The patent describes the application of a protective film on the surfaces of the silicon wafer to safeguard metallization and circuitry during the etching process. The protective film used is divinylsiloxane bisbenzocyclobutene (BCB), which exhibits high resistance to various wet chemical etchants and maintains its properties at elevated temperatures. The curing degree of this material is tailored to enhance its resistance to etchants and improve adhesion to the silicon wafer.
Career Highlights
Folsom is associated with Delco Electronics Corporation, where he has contributed to various projects involving semiconductor technologies. His work has been instrumental in advancing methods that enhance the reliability and efficiency of silicon wafer processing.
Collaborations
Throughout his career, Folsom has collaborated with notable colleagues, including Johnna Lee Haller and Dan Wesley Chilcott. These collaborations have fostered innovation and have been pivotal in the development of new technologies in the field.
Conclusion
Joseph Keith Folsom's contributions to the protection of silicon wafers during the etching process highlight his role as an innovator in semiconductor technology. His patented methods continue to influence the industry and improve manufacturing processes.