Jorge Jose Zaninovich

Title: Innovations of Jorge Jose Zaninovich

Introduction

Jorge Jose Zaninovich is a notable inventor based in Walnut Creek, CA (US). He has made significant contributions to the field of temperature control systems, particularly in substrate processing. With a total of 4 patents, his work has advanced the technology used in various industrial applications.

Latest Patents

One of his latest patents is titled "System and method for substrate support feed-forward temperature control based on RF power." This invention provides a temperature controller that includes interfaces, a compensation controller, summers, and a second controller. The system receives bias power and plasma signals to generate a control signal that adjusts the temperature of a substrate support. Another significant patent is the "Virtual metrology method for ESC temperature estimation using thermal control elements." This invention features a temperature controller that estimates the actual temperature response of a substrate support by calculating resistances of thermal control elements and correlating them with temperature responses.

Career Highlights

Throughout his career, Jorge has worked with prominent companies such as Lam Research Corporation and Caliper Life Sciences, Inc. His experience in these organizations has allowed him to develop and refine his innovative ideas in temperature control technology.

Collaborations

Jorge has collaborated with talented individuals in his field, including coworkers Tao Zhang and Josh Molho. Their combined expertise has contributed to the successful development of his patented technologies.

Conclusion

Jorge Jose Zaninovich is a distinguished inventor whose work in temperature control systems has made a lasting impact on the industry. His innovative patents and collaborations highlight his commitment to advancing technology in substrate processing.