Company Filing History:
Years Active: 2001-2006
Title: Joost Waeterloos: Innovator in Microelectronics
Introduction
Joost Waeterloos is a prominent inventor based in Leuven, Belgium. He has made significant contributions to the field of microelectronics, particularly in the development of advanced materials and methods for semiconductor fabrication. With a total of 3 patents to his name, Waeterloos continues to push the boundaries of innovation in his field.
Latest Patents
One of his latest patents is titled "Fluorinated hard mask for micropatterning of polymers." This invention discloses the formation of a hard mask layer in an organic polymer layer by modifying at least locally the chemical composition of a part of the exposed organic low-k polymer. This modification starts from an exposed surface of the polymer and extends into the polymer, thereby increasing the chemical resistance of the modified part. As a result, this modified part can be used as a hard mask or an etch stop layer for plasma etching.
Another notable patent is the "Method for forming copper-containing metal studs." This method relates to the fabrication of a copper-based multilevel interconnect structure. It is based on the formation of vertical metal connections through copper-containing metal stud growth on an underlying horizontal metal pattern, followed by a stud encapsulation step against copper diffusion into the surrounding dielectric. This method is particularly relevant when the insulating layers used to obtain this interconnect structure are polymer layers with a low dielectric constant and a high degree of planarization.
Career Highlights
Joost Waeterloos has worked with leading research institutions, including Imec Vzw and Imec Vzx. His work has significantly impacted the development of microelectronic technologies, making him a key figure in the industry.
Collaborations
Throughout his career, Waeterloos has collaborated with notable professionals, including Mikhail Rodionovich Baklanov and Serge Vanhaelemeersch. These collaborations have further enhanced his contributions to the field.
Conclusion
Joost Waeterloos is a distinguished inventor whose work in microelectronics has led to innovative solutions in semiconductor fabrication. His patents reflect his commitment to advancing technology and improving manufacturing processes.