Company Filing History:
Years Active: 1998
Title: Innovations of Jong-wook Kye in Photolithography
Introduction
Jong-wook Kye is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of photolithography, particularly in the development of advanced phase-shift masks. With a total of 2 patents, his work has implications for the manufacturing of integrated circuits.
Latest Patents
One of Jong-wook Kye's latest patents focuses on methods of forming half-tone phase-shift masks with reduced defects. This innovative method involves a series of steps that include forming layers on a transparent substrate, such as quartz. The process utilizes a phase-shift layer of MoSiON, an opaque material layer for blocking light, and a photoresist layer. The photoresist layer is patterned to create openings that expose the opaque material, which is then etched to reveal portions of the phase-shift layer. This technique minimizes parasitic sputtering of chrome during dry etching, thereby enhancing the yield of integrated circuits.
Another significant patent involves a photolithographic projection system that transfers patterns from a photomask to a wafer. This system includes a radiation source and a grating mask, which is positioned separately from the photomask. The method allows for precise pattern transfer, ensuring high fidelity in the manufacturing process.
Career Highlights
Jong-wook Kye is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of photolithography. His work has been instrumental in advancing the technology used in semiconductor manufacturing.
Collaborations
Throughout his career, Jong-wook Kye has collaborated with notable colleagues, including Seong-yong Moon and Sung-gi Kim. These collaborations have further enriched his contributions to the field.
Conclusion
Jong-wook Kye's innovations in photolithography demonstrate his expertise and commitment to advancing semiconductor technology. His patents reflect a deep understanding of the complexities involved in integrated circuit manufacturing, making him a valuable asset in the industry.