This inventor holds 1 USPTO granted patent. Top assignee: Electronics and Telecommunications Research Institute. Active years: 2000.
Company Filing History:
Years Active: 2000
Title: **Innovative Contributions of Jong Soo Kim in Optical Systems**
Introduction
Jong Soo Kim, located in Daejeon, South Korea, is a notable inventor recognized for his significant contribution to the field of optical systems. With one patent to his name, he has shown exceptional creativity and innovation, especially in the manufacturing processes involving semiconductors.
Latest Patents
Kim's patent, titled "Catadioptric Optical System for Lithography," represents a groundbreaking development in exposure apparatuses. This optical system combines a spherical mirror that refracts light and specialized lenses for astigmatism control. Notably, it utilizes a CaF₂ lens as the final lens, enabling the use of light sources with short wavelengths and wide bandwidths. This innovative design not only enhances the lifespan of the optical system but also ensures that intricate patterns from a mask are effectively transferred onto wafers, thereby allowing the realization of fine line widths crucial for modern semiconductor manufacturing.
Career Highlights
Jong Soo Kim is part of the Electronics and Telecommunications Research Institute, an organization known for its commitment to advancing technology and innovation. His work in the research institute highlights his dedication to developing solutions that contribute to the field of electronics and telecommunications, particularly in optical systems used for lithography.
Collaborations
Throughout his career, Kim has collaborated with distinguished coworkers, including Hai Bin Chung and Kag Hyeon Lee. These collaborations have bolstered his innovative ventures and have expanded the impact of his research in optical systems within the industry.
Conclusion
Jong Soo Kim stands out as an inventive force in the realm of optical technology. His patent on the catadioptric optical system exemplifies his commitment to enhancing semiconductor manufacturing processes. Through his work at the Electronics and Telecommunications Research Institute and his collaborative efforts with talented colleagues, Kim continues to contribute significantly to technological advancements.