Redmond, WA, United States of America

Jonathan L Klein


Average Co-Inventor Count = 3.3

ph-index = 2

Forward Citations = 54(Granted Patents)


Company Filing History:


Years Active: 2008-2013

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4 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Jonathan L Klein

Introduction

Jonathan L Klein, an accomplished inventor based in Redmond, WA, has made significant contributions to the field of micromechanical structures. With four patents to his name, Klein's work primarily focuses on innovative manufacturing techniques that advance the capabilities of silicon micromechanical resonators.

Latest Patents

Klein's latest patents detail a method for manufacturing vibrating micromechanical structures. This method involves a two-wafer process where single crystal silicon micromechanical resonators are fabricated using either Silicon-on-Insulator (SOI) or insulating base and resonator wafers. Key steps in his innovative process include the micromachining of resonator anchors, capacitive air gaps, isolation trenches, and alignment marks in the active layer of the base wafer. The active layer of the resonator wafer is subsequently bonded to the base wafer's active layer. Further refinements include the removal of the handle and dielectric layers of the resonator wafer, opening viewing windows in the active layer, and masking the active layer with photoresist material. Finally, Klein's method utilizes silicon dry etch micromachining technology to create a single crystal silicon resonator before dry stripping the photoresist material.

Career Highlights

Jonathan L Klein has established himself as a pivotal figure in his field, contributing to advanced technologies in micromechanics. He is currently affiliated with Honeywell International Inc., where he plays an instrumental role in the development and enhancement of innovative manufacturing techniques.

Collaborations

Throughout his career, Klein has collaborated with notable colleagues, including Galen P Magendanz and Ijaz H Jafri. Together, they have contributed to significant advancements in micromechanical devices, emphasizing the importance of teamwork in the pursuit of innovation.

Conclusion

In conclusion, Jonathan L Klein's work exemplifies the spirit of innovation within the field of micromechanics. His patents not only highlight his technical expertise but also pave the way for future advancements in the development of micromechanical structures. His contributions to Honeywell International Inc. and collaborations with esteemed colleagues ensure that his influence will continue to shape the landscape of this dynamic field.

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