The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2009

Filed:

Feb. 23, 2006
Applicants:

Jonathan L. Klein, Redmond, WA (US);

Galen P. Magendanz, Issaquah, WA (US);

Peter H. Lafond, Redmond, WA (US);

Mark L. Williams, Seattle, WA (US);

Michael J. Foster, Issaquah, WA (US);

Inventors:

Jonathan L. Klein, Redmond, WA (US);

Galen P. Magendanz, Issaquah, WA (US);

Peter H. LaFond, Redmond, WA (US);

Mark L. Williams, Seattle, WA (US);

Michael J. Foster, Issaquah, WA (US);

Assignee:

Honeywell International Inc., Morristown, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/00 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract

A microelectromechanical system (MEMS) device with a mechanism layer having a first part and a second part, and at least one cover for sealing the mechanism layer. The inner surface of at least one of the covers is structured such that a protruding structure is present on the inner surface of the cover and wherein the protruding structure mechanically causes the first part to be deflected out of a plane associated with the second part.


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