This inventor holds 7 USPTO granted patents. Top assignee: Advanced Micro Devices Corporation. Active years: 1998-2001.
Location History:
- Los Gatos, CA (US) (1998 - 2001)
- Essex Junction, VT (US) (1999 - 2001)
Company Filing History:
Years Active: 1998-2001
Title: Innovations of Jonathan Alan Orth
Introduction
Jonathan Alan Orth is a prominent inventor based in Los Gatos, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on optimizing lithographic processes and improving the quality of semiconductor products.
Latest Patents
One of his latest patents is titled "Apparatus and method for reducing defects in a semiconductor lithographic process." This invention involves an arrangement for optimizing a lithographic process that forms a pattern on a silicon wafer using a photocluster cell system. The system simulates actual processing conditions for semiconductor products. The resist pattern is inspected using a wafer inspection system, and an in-line low voltage scanning electron microscope (SEM) reviews and classifies defect types. This enables the generation of an alternative processing specification, which can be tested by forming patterns on different wafers and performing split-series testing for comparison with existing processes.
Another notable patent is "Process and system for flattening secondary edgebeads on resist coated wafers." This method addresses the flattening of resist mounds formed during a wet edgebead operation. The operation removes edgebeads formed when resist material is deposited on a semiconductor wafer. Solvent is introduced to soften the resist mounds, and the wafer is spun at high speed to achieve flattening.
Career Highlights
Jonathan currently works at Advanced Micro Devices Corporation, a leading company in the semiconductor industry. His expertise and innovative approaches have contributed to advancements in semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers, including Khoi A Phan and Gurjeet S Bains, who share his commitment to innovation in the semiconductor field.
Conclusion
Jonathan Alan Orth's contributions to semiconductor technology through his patents and work at Advanced Micro Devices Corporation highlight his role as a key innovator in the industry. His inventions continue to influence the development of more efficient and effective semiconductor manufacturing processes.